《Bonding in hard and elastic》.pdfVIP

PHYSICAL REVIEW B 68, 195401 2003 Bonding in hard and elastic amorphous carbon nitride films investigated using 15N, 13C, and 1H NMR spectroscopy W. J. Gammon,1 G. L. Hoatson,1 B. C. Holloway,2 R. L. Vold,2 and A. C. Reilly1 1 Department of Physics, College of William Mary, P.O. Box 8795, Williamsburg, Virginia 23187, USA 2Department of Applied Science, College of William Mary, P.O. Box 8795, Williamsburg, Virginia 23187, USA Received 14 February 2003; published 5 November 2003 The nitrogen bonding in hard and elastic amorphous carbon nitride (a -CN 15 x ) films is examined with N, 13C, and 1H nuclear magnetic resonance NMR spectroscopy. Films were deposited by dc magnetron sputter- ing, in a pure nitrogen discharge on Si001 substrates at 300 °C. Nanoindentation tests revealed an elastic recovery of 80%, a hardness of 5 GPa, and an elastic modulus of 47 GPa. The NMR results show that nitrogen bonding in this material is consistent with sp 2 hybridized nitrogen incorporated in an aromatic carbon envi- ronment. The data also indicate that the a -CNx prepared for this study has very low hydrogen content and is hydrophilic. Specifically, analysis of 15 13 1 N and C cross polarization magic angle spinning and H NMR experiments suggests that water prefe