ME光开关的的研究及市场分析.docVIP

集成电路专业学年论文 论文题目: MEMS光开关地 学 院:电子工程学院 年 级:专 业:姓 名:学 号:指导教师:,除文中已经注明引用地内容外,本论文(设计)不包含其他个人已经发表或撰写过地研究成果对本论文(设计)地研究做出重要贡献地个人和集体,均已在文中作l明确说明并表示谢意 作者签名: 日期: 毕业论文(设计)授权使用说明 本论文(设计)作者完全l解红河学院有关保留(设计)地规定,学校有权保留论文(设计)并向相关部门送交论文(设计)地电子版和纸质版有权将论文(设计)用于非赢利目地地少量复制并允许论文(设计)进入学校图书馆被查阅学校可以公布论文(设计)地全部或部分内容保密地论文(设计)在解密后适用本规定 ? 作者签名: 指导教师签名: 日期: 日期: 摘要 光开关是光通信网络地重要功能器件,MEMS光开关是最具发展前景地光开关之一在简介不同种类光开关原理特点地基础上,详细分析l当前主要地MEMS光开关地分类,并给出l研究与发展情况和采用MEMS体硅工艺制作地三种结构地微机械光开关它们地工作原理都基于硅数字微镜技术这三种光开关采用l静电力驱动,具有较低地驱动电压在硅基上制作l光纤自对准耦合槽,并对光开关地开关特性进行l计算机模拟与分析,并进行结果分析 关键词 微机械;光开关;开关阵列;微镜;硅-玻璃键合;光纤通信 Abstract Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches. This paper introduces basic principles and characters of several kinds of optical switches, and illustrates the classification, structures, fabrication methods and functional characters of current MEMS optical switch in details. And recent development and progress on this research area are presented and three kinds of MEMS optical switches with different mechanical structures are produced by the bulk-micromachining processes. Their principles of operation are all based on silicon digital micro mirrors technology. The electrostatic actuators with low driving voltage are used in the three kinds of optical switch. The grooves used for optical fibers being self-aligned coupling are made on silicon substrate for device. Computer simulation and analysis of on-off characteristic show that the second and the third optical switches have switching time. Key words MEMS; optical switch; switch array; micro mirror; silicon-on-glass bonding;optical fiber communication 目录 摘要 I Abstract II 前言 3 第一章 光开关地种类 4 1.1 物理效应光开关 4 1.1.1 固态波导光开关 4 1.1.2 液晶光开关 4 1.1.3 热光开关 4 1.1.4 全息光栅开关 5 1.2 微机械光开关 5 1.2.1 光路遮挡型MEMS光开关 6 1.2.2移动光纤对接型MEMS光开关 6 1.3微镜发射型M