用于高空气象探测的聚酰亚胺薄膜湿敏电容的研究.pdfVIP

4 ( ) No. 4 2014 7 Journal of East China Normal University (Natural Science) Jul. 2014 : 1000-5641(2014)04-0069-08 1 1 2 2 2 , , , , (1. , 200241; 2. , 201209) : MEMS , . , , . , 15%RH∼95%RH , 80%, 0.29pF/%RH, 1.5%RH, , 4 s, , . , , , . : ; ; ; MEMS : TP212 : A DOI: 10.3969/j.issn.1000-5641.2014.04.009 Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation 1 1 2 2 2 BIAN Xiao-yue , ZHANG Jian , WANG Jian-ping , JI Chun , WU Yi-qi (1. School of Information Science Technology, East China Normal University, Shanghai 200241, China; 2. Changwang Meteorological Science and Technology Co., Ltd., Shanghai 201209, China) Abstract: Based on MEMS technology, a design of humidity sensitive capacitor was described. The capacitor employed sandwich structure, i.e. polyimide was used as the humidity sensitive material and gold was used as the electrodes. Capacitor shows a good pass rate of 80%. As can be seen from the measurements, over the testing range from 15% RH to 95% RH, the maximum linearity error is 1.5% RH. The sensitivity reaches 0.29pF /% RH. The hysteresis is small, and the sensor has fast response time of 4 s. Meanwhile, capacitor shows good temperature coefficient and long-term stability