用于研制纳米长度标准的激光准直原子技术的研究.pdfVIP

第 卷第 期 年 月 43 9 红外与激光工程 2014 9 Vol.43 No.9 Infrared and Laser Engineering Sep.2014 Collimation of atomic beam for the fabrication of nano鄄scale length standards Ma Yan , Xiao Shengwei , Zhang Wanj ing (Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology , Department of Physics, Tongj i University , Shanghai 200092 , China) Abstract : To meet the requirement of Nano鄄scale dimensional metrology , length standards with features below 100 nanometers were indispensible instruments. The length standards with periodic length of 213 ± 0 .1 nm were successfully fabricated through atom lithography , which was connected to atomic transition frequency and thus retraceable to a constant measured with highly accuracy . For further improvement of the quality of these standards, the evaluation and optimization of collimating the atomic beam were described in this article . A knife鄄edge was settled to cut the atomic beam collimated by the laser Doppler cooling . The fluorescence of the beam was collected to calculate its angular distribution and equilibrium transverse temperature . The stimulated absorption rate was considered and discussed . Full angular width at half maximum as small as 0 .544 mrad was observed, corresponding to temperature of 343 .8 μK . Several angular distributions were measured by changing the laser characteristics to optimize the collimation .