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Material Science Service The Tier-one Lab in Materials Science Service Mission Location Iterative cycle of analysis Typical FA Flow Typical FA Flow Typical FA Flow Challenge of FA Electrical Analysis Localization and electrical characterization Verification and test Fault isolation and simulation software Physical Analysis Deprocessing techniques for new materials Imaging of minute defects and structures Detection and characterization of non-visual defects Other Cost of failure analysis Complexity and volume of data Material Analysis (I) Material Analysis (II) SEM SEM /EDS Analysis FE-AES IST FE-AES Analysis TEM SIMS Protocol recently developed for shallow arsenic implants High depth resolution Repeat profiles with ± 2% standard deviation High precision allows implanter comparisons Case Study ? Summary 1. MVI will be a trusted foundry partner to satisfy customer’s requirement such as order capacity and device performance 2. MVI own strong manufacture and development team with average over 10 years fab production experience 3. MVI frequently co-work with customer to develop more advanced Power MOSFET device base on marketing request 4. Excellent product yield and foundry service are the best promise to our customer Professional materials analysis service in nano-structure analysis Total solution in Electrical and Physical failure analysis service Contribution in Material Science by Providing professional analysis service Virtual Lab for Lab less house efficiency cost extension develop with partner Supporting/Innovation center MSS Business Promotion Engineering Service TEM SEM FIB Integrated Service … Sales RD Logistics Organization Chart Material Analysis Electrical Analysis Physical Analysis Tester EMMI, OBIRCH, LC hot spot, E-beam tester Memory tester VC SEM FIB Mark Memory Cell Logic Circuit Corrective Action Report Delayer Auger SIMS SEM/EDS TEM/EELS/EDS FIB Cut plan-view x-sectional Confirm failure charac

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