新 Microsoft Word 文档.docVIP

Microaccelerometers are used for diverse areas ranging from inertial navigation to vibration monitoring for their low cost, small size and broad frequency response. Among different detecting principles, resonant microaccelerometer is based on detecting frequency shift due to the inertial force caused by the applied acceleration on the proof mass. This kind of microaccelerometer has been under focus because of its significant advantages over conventional types such as high resolution and quasi-digital output. Since the typical sensitivity of ever designed electrostatic driven silicon based resonant accelerometer is no more than several tens Hz/gn due to lacking effective force amplifying structure, a novel design basing on an effectively force amplifying structure which aims at achieving much higher sensitivity has been de signed. But this newly designed silicon based resonant accelerometer is too complex to be accurately modeled in theory. To tackle this problem, FEA simulation has been used to assess this structure and the result of FEA asserts that the sensitivity of the newly designed resonant microaccelerometer is about 1377 Hz/gn. What is more, the situation that DETF is not perfectly matched due to practical fabrication has been taken into consideration and the major character of vibrating shape of not perfectly matched DETF has been discussed in detail. 微加速度传感器因其成本低，体积小，较宽的频率响应用于惯性导航不同领域。在不同的检测原理，是基于加速度引起大规模惯性力检测频移。这种微加速度已由于对诸如高分辨率和准数字输出常规类型的显着优势。由于设计过基于静电驱动的谐振加速度的典型灵敏度不超过数十赫兹缺乏有效的设计力量放大结构旨在以实现更高的灵敏度新颖的已撤销签署。但这种新设计的硅基谐振加速度太复杂无法理论准确模型。为了解决这个问题，有限元被用来评估这种结构有限元分析结果宣称，新设计的谐振微加速度灵敏度约为1377赫兹/。实际生产情况主要进行了详细讨论。This design is based on a differential symmetric structure .When the force F caused by proof mass under acceleration bends the supporting beams(beam 1), the axial force N acting on the double ended tuning fork(DETF) will modify its intrinsic resonant frequency. The differential design of accelerometer induces that one DETF is under tensile force while the other