6 ICP-MS Plasma generation.pptVIP

Varian ICP-MS Plasma Generation System Agenda Plasma generation system overview Practical exercises RF system overview The plasma generation system components located inside the RF enclosure are: the impedance matching network (IMN) including the interlaced coils the torch and the translation mechanism RF system overview The following RF system components are located on the lower rear door of the instrument: magnitude/phase assembly RF generator DC supply module Plasma Generating System block diagram DC supply module The function of the Cherokee DC power supply is simply to provide the RF generator with a DC voltage source. OEM unit manufactured by Cherokee International in the USA. DC supply module It is a box-mounted single-phase, 3000W rectifier unit. The input voltage range is: 180-264VAC, 47-63HzProgrammable output voltage range of 40 – 58VDC @75A maximum.The ICP-MS has the output voltage programmed at 36VDC for soft start mode and 44VDC for normal operation. The soft start function lasts for 20 seconds and is controlled by the small PWB attached to an external D-range connector. RF generator OEM unit manufactured by Seren Industrial Power Systems, USA. It is water cooled, Operates from a typical DC supply of  operating: +44V @ 63A  soft start: +36V 63A Maximum RF power output of 1750 Watts,  at a fixed frequency of 27.12MHz. Most methods typically use 1200W to 1400W.  Seren RF generator The Seren requires the following inputs for the generation of the high power RF supply: - An external DC power source  - Cooling water - Control signals (15 Pin D-Range) The Cherokee unit provides the external DC power source. Seren RF generator The Seren RF module receives control signals directly from the instrument system control PWB. The RF power connections are N type connectors, connected from the Seren to the magnitude/phase detector, to the RF enclosure and finally to the IMN via 50 ohm coaxial cables.  Seren configuration The