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1.1、What Is MICROSYSTEMS Micro System regard microelectronic technology, RF and wireless technology, optical (or optoelectronics) technology, micro-electromechanical systems (MEMS) technology as the core, and it manufacture、assemble、 integrate functional micro devices from systems engineering perspective, through encapsulation, interconnection and other micro-processing technology in the framework, such as vector substrate. Micro System also known as micro-information system project. These micro-system, including consumer electronics products, information products, todays technological advances and human activities are closely integrated with the wide range of small-system. The status of micro-system technology The Relationship Between Micro-systems And The IC Manufacturing Microelectronics technology promote the progress of the development of the micro-system，as it created the conditions of the realization of Microsistem . Micromachining technology of Microelectronics engineering is only an important part of the foundation for the key of Micro System Technology - micro-manufacturing technology, but it is not all, it was decided by the difference between a micro-systems and microelectronic circuit structure . Micro System may contain movable components and sensors, it is a multi-functional complex system of the three-dimensional structure of a highly centralized in optical and electrical machinery,by the contray，integrated circuits and processing technology is a two-dimensional surface or shallow, but the main thing is processing silicon . Therefore, the entire manufacturing process of Microsistem,such as chip processing, integrated assembly, packaging and testing of integrated circuits, is much more complicated than the manufacturing process of integrate circuit. 1.2 Micro-system Technology Based Microelectronics Technology Microelectronics technology is a technology which is based on semiconductor materials and using micro-processing technology manufacturi