多晶硅中二氯二硅反歧化综述.docxVIP

二氯二氢硅歧化反应的综述摘要：二氯二氢硅（Dichlorosilane ,简称DCS）是多晶硅行业中产生的废料之一，如何充分利用二氯二氢硅，减少污染，增加三氯氢硅的产量，是多晶硅行业中比较重要的问题之一。本文详细综述了国内外二氯二氢硅歧化反应的有关技术，并对二氯二氢硅歧化反应的催化剂进行了详细的叙述，为今后进一步研究二氯二氢硅的歧化反应提供了理论依据。关键词：二氯二氢硅，歧化，多晶硅英文摘要：Dichlorosilane is one of the by-products from the reaction of at least one of meatallurgical silicon and silicon tetrachloride with at least one of anhydrous hydrogen chloride and hydrogen to produce trisilane.It is important to the silicon industry how to take advantage of the dichlorosilane. This paper introduced the dispropornation of dichlorosilane to produce trichlorosilane and summarized the d