LDI日立曝光设备说明详解.ppt

* * * * * * * * * * * * * * * 2009 April: *Orbotech: 360 units *JP 4 vendors: 160-170 units *Bacher: LED-based LDI; 150 LED lamp on the exposure frame; quick on/off speed, so very quick exposure; See one unit in Multek Germany for solder mask. *Ibiden: currently ~20units Hitachi Via, may buy another 10 units for Malaysia plant) *ORC m/c: OPC HK, Meiko GZ / Wuhan *WW contact automatic exposure m/c is 5500 units * * * * * * * * * * * * * * * * * * * * * CCD控制电脑 LD控制电脑（PC2A) LD控制电脑（PC2B) 工作站电脑（WS) CNC (MARK-30） Power Supply 对位控制 CCD 照明灯 CCD 照明灯 CCD 1 CCD 1 CCD 控制器 光源 LD 电源板 DMDx2 控制板 RTD