汤有纶-20121027-浅谈电子特气发展趋势totzbg20121026精编.ppt

Product Name Purity Packaging Applications ClF3 ≥99.9% Cylinder (3.4L, 10L, 40L, 88L)Material: Stainless steel LP-CVD chamber cleaning gas 20%F2/80%N2 F2 :≥99.9% N2 : ≥99.999% Cylinder (10L, 47L), Bundle Material: Manganese steel LP-CVD chamber cleaning gas HF ≥99.999% Cylinder (3.4L, 10L, 40L) Material: Stainless steel Etching gas, LP-CVD chamber and exhaust pipe cleaning gas CentraL Glass（中央硝子)相关产品 Cleaning Gases for Semiconductors and Liquid Crystal Manufacturing Equipment CVD Process Gases for Semiconductors CentraL Glass（中央硝子)相关产品 Product Name Purity Packaging Applications SiH(CH3