直拉单晶棒少子寿命的检测.pptVIP

籽晶晶体定向的检测 Detection of seed crystal orientation Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 检测依据及设备、原理 检测作业指导书 检测数据分析 2 3 4 采样及其样品处理 1 检测报告书 5 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 采样及其样品处理 一、采样 1、单晶棒 2、单晶片：取头部、中部、尾部各三片，要具有代表性 二、样品处理 1、试样待测面用28~42μm或20~28μm金刚砂研磨或喷砂。 2、 对圆片试样，用5~14μm氧化铝或金刚砂研磨上下表面。 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspo