半导体制备技术简介CH09学习课件.ppt

Hong Xiao, Ph. D. www2.austin.cc.tx.us/HongXiao/Book.htm Chapter 9, Etch Objectives Upon finishing this course, you should able to: Familiar with etch terminology Compare wet and dry etch processes List four materials need to be etched during IC processing and list the main dry etch etchants Describe etch process in IC fabrication Become aware of hazards in etch processes Outline Introduction Terminology Wet and dry etch Plasma basics Plasma etch processes Definition of Etch Process that removes material from surface Chemical, physical or combination of the two Selective or blanket etch S