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Fabrication of photonic crystals by laser holographic lithography HKUST Dept. of Phys. * 1. E-beam lithography Nature 429, 540 (2004) Fabrication methods for 3D microstructures * Nature 429, 540 (2004) * 2. Self-assembly Fabrication methods for 3D microstructures * Nature 405, 437 (2000) Adv. Mater. 14, 1368 (2002) * Fabrication methods for 3D microstructures 2. Self-assembly * 3. Autocloning process APL, 77, 2613, 2000 APL, 77, 4256, 2000 EL, 39, 53, 2003 Fabrication methods for 3D microstructures * Fabrication methods for 3D microstructures 4. Wafer-fusion and laser beam-assisted precise alignment technique To accomplish this goal, a comprehensive five-level stacking process was developed. Within each layer, SiO2 was first deposited, patterned, and etched to the desired depth. The resulting trenches were then filled with polycrystalline silicon. Following this, the surface of the wafers were made flat using chemical mechanical polishing, and the process was then repeated. After the five-level process was completed, the wafer was immersed in a HF/water solution for the final SiO2 removal. * “Full 3D Photonic Bandgap Crystals at Near-Infrared Wavelength”, Science 289, 604 (2000) JJAP, 35, P2-L909, 1996 JJAP, 37, P2-L1052, 1998 * 5. Two-photon microfabrication Fabrication methods for 3D microstructures 双光子聚合的优点： 利用双光子聚合几率与光强的平方成正比，因而聚合区域可以小于光束衍射极限，可以得到比激光波长还小的微米与亚微米结构。 * 5. Two-photon microfabrication Nature 412, 697 (2001) APL 74, 786 (1999) Nature Mater. 3, 444 (2004) Fabrication methods for 3D microstructures * * Why Laser Holographic Lithography? Single step process; Cheap; Rapid fabrication; Large sample area and volume; High completeness in periodicity Fabrication methods for 3D microstructures Light intensity calculation * Basic chemical procedure Photo initiator + h? H+ Catalyze the polymerization of SU8 Experiments Photo resistor (PR): SU8 + photo initiator Procedure: Spinning PR on substrate