ppt课件-p m e ms 过程-ferroelectricand 多铁性测试（p m e ms process- ferroelectricand multiferroic testing）.pptVIP

* * Piezoelectric Characterization in an AFM Joe T. Evans, Jr, Radiant Technologies, Inc. Introduction Radiant has developed a special packaged die containing thin PZT film capacitors constructed to aid piezoelectric characterization in an AFM. The capacitors have exposed top electrode and exposed PZT surfaces over bottom electrode to allow PFM characterization. The devices may also be used to execute more conventional piezoelectric measurements such as the butterfly loop. All of the characterization techniques that may be executed on one of these reference devices will be described