EE C25 - ME C218Introduction to MEMS DesignFall 2003.pptVIP

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EE C25 - ME C218Introduction to MEMS DesignFall 2003.ppt

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EE C245 - ME C218Introduction to MEMS DesignFall 2003 Roger Howe and Thara Srinivasan Lecture 1 Course Overview Lecture 1 Introduction to MEMS Lectures 2-4 Microfabrication Fundamentals Lectures 5-13 Forces, Mechanics, and Transduction Lectures 14-18 Microsystem Fabrication Processes Lectures 19-23 Electronic Interface Design Principles Lectures 24-29 MEMS Design Case Studies Texts: 1. Stephen D. Senturia, Microsystem Design, Kluwer Academic Press, 2001 2. EE C245 Course Reader, Copy Central (Southside) What are the Goals of this Course? Accessible to a broad audience ? minimal prerequisites Design emphasis ? exposure to the techniques useful in analytical design of structures, transducers, and process flows Perspective on MEMS research and commercialization circa 2003 Related Courses at Berkeley EE 143 (Nathan Cheung) Microfabrication Technology ME 119 (Liwei Lin) Introduction to MEMS BioEng 121 (Luke Lee) Introduction to Micro and Nano Biotechnology and BioMEMS ME C219 – EE C246 (Al Pisano) MEMS Assumed background for EE C245: senior standing in engineering or physical/bio sciences Course Mechanics Lectures: Tuesday, Thursday 2:10-3:30203 McLaughlin Hall (205 McLaughlin for overflow)Webcast at Homework: weekly assignments distributed on Thursdays and due the following Thursday at 5 pm in the EE C245 box near 275 Cory Hall Exam: Wednesday, October 15, 6:30-8:00 pm Sibley Auditorium, Bechtel Engineering Center Term Project: oneproposal due October 23 sixpaper due December 8, with poster presentation (dates/rooms TBA) Course Mechanics (Cont.) Office Hours Roger Howe, 231 Cory Hall, Mondays 1:15 -- 3:00 Thara Srinivasan, 465 Cory Hall, Fridays 10:30 – 12:00 Credit breakdown (approximate) 15% homework 25% midterm exam 60% final project (40% written paper, 20% poster) Lecture Outline Reading Senturia: Chapter 1 Today’s Lecture MEMS defined Historical tour of MEMS MEMS and nanotechnology