MEMSCAP at a Glance RAL SOFTWARE MEMSCAP 174一眼类软件.pptVIP

Generic : VULCAINTM Customizable by the User to the targeted process technology Seamless Design Flow: from Front-End to Back-End Anisotropic Sacrificial Etching Simulation Multi-Segment, Multi-Angle Cross-Section Viewer Layout to/from 3D Solid-Model Generator EDDTM-Mesh : FEM to HDL-A Translator Foundry Modules : KANAGATM [MCNC/Cronos] More than 75 Device Generators ! Algorithms : Monte Carlo Surface Response Methods Customizable for any MEMS Process Extract Data from Process of Critical Monitors Build Statistical Model Behavioral Simulation Considering Process Variations Design Centering Slide * J. M. Karam Company Confidential J.M. Karam President CEO MEMSCAP Phone: +33 4 76 52 55 80 Fax: +33 4 76 52 55 81 Email: Jean-Michel.Karam@ Specifications Architecture Optimization Schematic Capture Behavioral Simulation Design Centering Automatic Layout Generation DRC Etching Verification Cross-Section Viewing 3D Viewing FEM/BEM Process Variations Specifications Architecture Optimization FEM/BEM Analysis Behavioral Modeling Behavioral Simulation Layout Generation DRC Etching Verification Cross-Section Viewing 3D Viewing Design Centering Full System Functionality Process Variations Schematic Capture (e.g. DA) Mixed-Technology Simulator (e.g. Continuum/Eldo) PlaceRoute [Layout Tool] (e.g. IC Station) MEMS HDL-A/ VHDL-AMS Library Layout Generators Technology Files FEM to HDL-A Translator DRC Cross-Section Viewer Etching Verification Result Interface Field Solvers (FEM, etc.) ANSYS Device Designer System Designer Optimization Manufacturing Yield Management Tools Layout to 3D Solid-Model Material Data Base MEMS HDL-A Model Schematic Symbol Layout Generator Building Block Level Device Level Generic FEM Validated Characterized Level 2 Level 1 Ensure Schematic Driven Layout Generators Coupled to System Level Model Improve Productivity at Layout Custom Design Device Generators Function