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The effect of NiSi ratio on microstructural properties of NiSi ohmic contacts to SiC.pdf
Applied Surface Science 369 (2016) 535–544
Contents lists available at ScienceDirect
Applied Surface Science
journal homepage: /locate/apsusc
The effect of Ni:Si ratio on microstructural properties of Ni/Si ohmic contacts to SiC
M. Wzorek ?, M.A. Borysiewicz, A. Czerwinski, M. Mys′liwiec, M. Ekielski, J. Ratajczak, A. Piotrowska, J. Ka? tcki
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
article info
Article history: Received 21 December 2015 Accepted 9 February 2016 Available online 11 February 2016
Keywords: Ohmic contact Silicon carbide Nickel silicides Microstructure
abstract
Detailed microstructural studies were performed on Ni/Si ohmic contacts to silicon carbide in order to investigate the effect of initial Ni:Si ratio in as-deposited structures on the occurrence of characteristic defects in Ni silicide layers, such as voids, layer discontinuities, rough surface or rough interface. The chosen range of investigated Ni:Si ratios corresponded to ?-Ni2Si as a dominant phase after complete annealing sequence. Strong effect of the initial stoichiometry on the ohmic contact’s microstructure was observed. The highest Ni concentration signi?cantly lowered the temperature at which roughening of the surface and the interface occurred. The middle value of investigated concentrations resulted in the rough interface after high temperature annealing, while the lowest investigated Ni content preserved smooth interface but introduced large voids and layer discontinuities. After the ?rst annealing step, ?Ni31Si12 and/or ?-Ni2Si phases were detected. In the ohmic contacts (after two-step annealing sequence), beside ?-Ni2Si, the metastable, high temperature phase ?-Ni2Si was detected (also referred to as Ni3Si2·h). This phase can exist within a relatively broad range of Ni:Si stoichiometry. The stoichiometry change toward higher Si content, which occurs during high temperature annealing, was realized through this phase. Superstructures were detected
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