Chapter 14 - STEM.pdfVIP

MSE-603 doctoral school 2009 STEM Marco Cantoni 1 14. STEM Scanning Transmission Electron Microscopy Marco Cantoni, 021/693.48.16 Centre Interdisciplinaire de Microscopie Electronique CIME MSE-603 doctoral school 2009 STEM Marco Cantoni 2 Content a) STEM, principle, basics, TEM / STEM with the same instrument Transmission Electron Microscopy a Textbook for Materials Science David B. Williams and Barry Carter ISBN 0-306-45247-2 b) Analytical Electron Microscopy (AEM) Practical Analytical Electron Microscopy in Materials Science David B. Williams ISBN 0-9612934-0-3 c) High angle annular dark-field, HAADF Z-contrast Handbook of Microscopy, Methods II S. Amelinckx, D. van Dyck, J. van Landuyt, G. van Tendeloo ISBN 3-527-27920-2 MSE-603 doctoral school 2009 STEM Marco Cantoni 3 CTEM/SEM principles Conventional Transmission Electron Microscope Scanning Electron Microscope Slide Projector TV What you see is what the detector sees !!! MSE-603 doctoral school 2009 STEM Marco Cantoni 4 TEM-SEM interaction of electrons with the sample Specimen In ci de nt b ea m Auger electrons Backscattered electrons BSE secondary electrons SE Characteristic X-rays visible light “absorbed” electrons electron-hole pairs elastically scattered electrons direct beam inelastically scattered electrons Bremsstrahlung X-rays 1-100nm MSE-603 doctoral school 2009 STEM Marco Cantoni 5 Detectors in S(T)EM ? Secondary Electrons ? Backscattered Electrons ? X-rays ? EELS ? Bright field ? Dark field ? (Absorbed current) MSE-603 doctoral school 2009 STEM Marco Cantoni 6 Advantages and disadvantages of Scanning Beam Microscopy TEM - STEM (SEM) Advantages ? Parallel detection of different signals ? Easy positioning of the beam (EDX, EELS) ? Small interaction volume, High energy (EDX) Disadvantages ? Longer acquisition times (line by line) ? Image distortions (deflection coils) ? More complicated alignment procedure ? More expensive… MSE-603 doctoral school 2009 STEM Marco Cantoni 7 a) Principle MS