CrMnMoVA钢论文：CrMnMoVA钢磁控溅射Al薄膜正交实验化学转化.docVIP

【关键词】15CrMnMoVA钢 磁控溅射 Al薄膜 正交实验 化学转化 【英文关键词】15CrMnMoVA steel Magnetron sputtering Al film Orthogonal test chemical conversion shot peening 15CrMnMoVA钢论文：15CrMnMoVA钢磁控溅射镀铝耐腐蚀性研究 【中文摘要】采用直流脉冲磁控溅射技术在15CrMnMoVA钢表面制备了纯Al薄膜。采用SEM、厚度干涉仪、电子拉伸试验机、XRD、测试分析了该薄膜的形貌、厚度、相结构、附着性能,采用盐雾试验机分析对比了薄膜的耐中性盐雾性能,利用电化学工作站测试其极化曲线,从而分析其电化学性能。取得了如下结果：1)利用正交实验的原理设计了Al薄膜制备的正交实验方案。选择了负偏压、靶电流和炉压三个因素进行分析。结果表明：Al薄膜晶粒大小均匀,以柱状晶方式生长,膜/基界面平整,没孔、洞等缺陷,并且有一致密的过渡层；单位厚度(μm)的耐盐雾时间可达51.44h,大大提高了基体6h的耐盐雾时间；沉积Al薄膜后,基体的自腐蚀电流降低了近2个数量级；在Al薄膜沉积过程中,靶电流对其影响最大,偏压次之,炉压的影响作用最小,三个因素的优化值分别为25A、300V、0.35Pa.2)本文以优化工艺25A、300V、0.35Pa为基础,深入研究了负偏压、靶电流、炉压与Al薄膜性能之间的规律。实验过程中靶电流取10A、20A、25A、30A,偏压取-100V、-200V、-300V,炉压取0.25Pa、0.35Pa、0.45Pa、0.6Pa,分别进行研究,分析结果表明：靶电流取25A、偏压取-300V、炉压取0.35Pa时Al薄膜的耐腐蚀性能出现极值,与正交实验相吻合。3)采用阿洛丁配方对Al薄膜进行化学转化和喷丸后处理,对阿洛丁的浓度、反应时间作了系统的分析,得出如下结论：化学转化处理对Al薄膜起封孔作用,可以使Al薄膜的耐腐蚀性能提高9倍；浓度由8g/L增加到15g/L的过程中,晶粒会出现长大、团聚的现象；浓度为8g/L时,极化曲线表现出钝化现象,当浓度增加时,耐中性盐雾腐蚀性能逐渐降低；对40s、60s、120s、180s的反应时间进行分析发现,反应时间在40s～120s之间时性能较好。 【英文摘要】Al coatings were deposited on15CrMnMoVA steel by DC pulsed magnetron sputtering. The structure, thickness and adhesive strength of the coating were investigated by SEM, interferometer, X-ray diffraction and tensile tester, a neutral salt spray (NSS) test and potentiodynamic polarization were used to investigate the anti-corrosion performance. The following results are what got:1) Orthogonal test was designed on the preparation of Al-films, during which bias voltage, target current and argon pressure were investigated in detail, the results are as follows:fine crystals sized1～2μm deposited uniformly on the surface of the substrate, the films present columnar structure without defects(such as voids and micropores) and strong adhesion and a higher concentration transition layer exists at the interface; The time of anti-NSS per μm can reach up to51.44h, enhanced the substrate’s6h greatly; The Al-film decreased the icorr at approximately two orders of magnitude; T