第二章.半导体晶体的高分辨X射线衍射学案.pdf

第二章 半导体晶体的高分辨 X 射线衍射 ..........................................................................3 2.1 引言...........................................................................................................................3 2.2 半导体晶体结构与结构缺陷...................................................................................5 2.2.1 金刚石结构.......................................................................................................5 2.2.2 闪锌矿结构.......................................................................................................6 2.2.3 纤维锌矿结构...................................................................................................7 2.2.4 晶体结构缺陷.................................................................................................10 2.2.4.1 点缺陷.............................................................................................10 2.2.4.2 层错.................................................................................................12 2.2.4.3 密排面心立方中的孪晶.................................................................13 2.2.4.4 纤维锌矿结构中的层错.................................................................14 2.2.4.5 位错.................................................................................................15 2.2.4.6 纤维锌矿结构中的位错.................................................................21 2.2.4.7 位错的弹性能.................................................................................24 2.2.4.8 位错和点缺陷的交互作用.............................................................24 2.2.5 异质外延晶格应变.........................................................................................25 2.2.6 异质外延膜的临界厚度.................................................................................28