加入10%Si 对阴极电弧蒸镀 TiAlSiN 涂层的影响.pdfVIP

Trans. Nonferrous Met. Soc. China 26(2016) 1638− 1646 Effect of 10% Si addition on cathodic arc evaporated TiAlSiN coatings 1 1 2,3 2 Li-hui ZHU , Cheng SONG , Wang-yang NI , Yi-xiong LIU 1. School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China; 2. Kennametal Inc., 1600 Technology Way, Latrobe, PA 15650, USA; 3. Stryker Orthopaedics, 325 Corporate Drive, Mahwah, NJ 07430, USA Received 25 June 2015; accepted 8 April 2016 Abstract: The effect of 10% Si (mole fraction) addition on TiAlSiN coatings was studied. Ti0.5Al0.5N, Ti0.5Al0.4Si0.1N and Ti0.55Al0.35Si0.1N coatings were deposited on WC−Co substrates by cathodic arc evaporation. The microstructure and mechanical properties were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nano-indentation measurement and scratch test. The mechanisms of how Si affects the properties and failure modes of TiAlSiN coatings were also discussed. The results show that the addition of 10% Si results in the formation of nc-(Ti,Al,Si)N/a-Si N 3 4 nano-composite structure. The hardness and toughness of TiAlSiN coatings increase, whereas the coating adhesion strength decreases. Compared with Ti0.55Al0.35Si0.1N coating, Ti0.5Al0.4Si0.1N coating has higher hardness but lower toughness. The dominant failure mode of