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Lab6NanoindentationofQuartz,AluminumSingle
Lab 6 Nanoindentation of Quartz, Aluminum Single
Crystals and UNCD Thin Films
1. Introduction
With the development of micro/nano science and engineering, mechanical properties of thin films at the micro scale have attracted more and more interest. For example, thin films can decrease wear and friction. Thin films are also building blocks of MEMS devices. Recently, techniques have been developed to interrogate the mechanical properties of materials at submicron scales. For example, a nanoindenter system can continuously control and monitor the loads and displacements of an indenter as it is driven into and withdrawn from a material.
In Professor Espinosa’s laboratory, a combined MTS Nanoindenter - Digital Instrument 3100 AFM (Atomic Force Microscope) microscope with loading fixture will be used for this lab session. By imaging the sample surface using the AFM optics, you will choose some places you are interested to test. Then the sample will be sent to under the nanoindenter to run the tests. After the tests are finished, your sample will be sent back to the AFM.
Fig.1 instruments setup
The most common tip geometry used for nanoindentation is the Berkovich diamond tip. It is a three-sided pyramid-shaped indenter with an area function (projected area as a function of depth) similar to that of the Vickers indenter. The centerline to face angle is 65.35(. Because of manufacturing limitations, the tip is not perfectly sharp. Its radius of curvature is typically between 100 and 200 nm. This tip geometry has been used as the standard for nanoindentation. It is used primarily for Bulk materials and thin films of thickness greater than 100 nm. The Berkovich tip is also widely used for scratch measurements.
Fig.2 Berkovich tip
In this lab session, we will study how to operate the nanoindenter instrument, how to properly interpret the load-displacement da
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