基于TPWL方法的MEMS热微执行器的热电耦合宏建模.pdfVIP

第28卷 第4期 传 感 技 术 学 报 V01．28 No．4 2015年4月 CHINESE JOURNALOFSENSORSANDACTUATORS Apr．2015 ThermoelectricM acromodelingforThermalM icroactuatorUsing TrajectoryPiecewise-LinearModelOrderReduction LlU Ying，YUAN Weizheng，CHANGHonglong (MOEKeyLaboratoryofMicro／Nano ternsforAerospace，NorthwesternPolytechnicalUne~ ，Xi’an710072，China) Abstract：Usingthetrajectorypiecewise—linear(TPWL)method，anonlinearthermoelectricmacromodelingtechnique forthethermalmicroactuatorispresented．First，consideringthecouplingeffectsbetweenthermalfieldandelectric fieldaswellasthetemperature．dependenceofmaterialproperties．a3D nonlinearthermoelectricmodelofrthethermal microactuatoriSestablished．Andthefiniteelementmethod(FEM iSusedtodiscretethespatialderivativesinthe themr oelectricmode1．Second．anew linearizationpointselectionmethod，whichiSbased0naglobal maximum error controller．iSemployedtoselectthelinearizationpoints．Finally，thethermoelectricmacromodelofrthethermalmicro． actuatoriSobtainedbyusingtheTPWLmethod．Theaccuracy．efficiencyandexpandabilityofthemacromode1arein- vestigatedbyusingtheexampleofathermomechanicalin—planemicroactuator．Comparedwiththesimulationresults ofthenonlinearfu11．meshed mode1．therelativeerrorofthe macromodelcan reach to0．036％．Moreover，the simulationofthemacromodeliSatleast10()timesfasterthanthenonlinearfu11．meshedmode1． Keywords：microactuator；macromodeling；trajectorypiecewise—linear；thermoelectric；nonlinear EEACC：2575D；8380M doj：10．3969／j．issn．1004—1699．2015．O4．001 基于 TPWL方法的MEMS热微执行器 的 热 电耦合宏建模 术 刘 莹，苑伟政，常洪龙 (西北工业大学空天微纳系统教育部重点实验室，西安 710072) 摘 要 ：本文给出了一种基于轨迹分段线性化TPwL(TrajectoryPiecewise—Linear)方法的非线性热电耦合宏建模技术。首先 建立了MEMS热微执行器的三维非线性热电耦合模型，并采用有限元方法对其进行空间离散，然后利用新的基于全局最大误 差控制的线性化点选择算法获得一组线性化点，最后使用TPWL方法构造 MEMS热微执行器的热电耦合宏模型。