Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip 英文参考文献.docVIP
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Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip 英文参考文献
Sensors 2010, 10, 10095-10104; doi:10.3390/s101110095
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Polypyrrole Porous Micro Humidity Sensor Integrated with a
Ring Oscillator Circuit on Chip
Ming-Zhi Yang, Ching-Liang Dai * and De-Hao Lu
Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan;
E-Mails: g9761312@.tw (M.-Z.Y.); g9561109@.tw (D.-H.L.)
* Author to whom correspondence should be addressed; E-Mail: cldai@.tw;
Tel.: +886-4-2284-0433; Fax: +886-4-2287-7170.
Received: 25 September 2010; in revised form: 28 October 2010 / Accepted: 28 October 2010 /
Published: 10 November 2010
Abstract: This study presents the design and fabrication of a capacitive micro humidity
sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary
metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about
1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing
capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity
of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the
chemical polymerization method, and the film has a porous structure. The sensor needs a
post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to
etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The
sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor.
The ring oscillator circuit converts the capacitance variation of the sensor into the
oscillation frequency output. Experimental results show that the sensitivity of the humidity
sensor is about 99 kHz/%RH at 25 ?C.
Keywords: humidity sensors; polypyrrole; CMOS-MEMS; ring oscillator circuits
1. Introduction
Humidity sensors that are used to measure and monitor environmental humidity are
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