SnO2Pt Thin Film Laser Ablated Gas Sensor Array 英文参考文献.docVIP

Sensors 2011, 11, 7724-7735; doi:10.3390/s110807724 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article SnO2/Pt Thin Film Laser Ablated Gas Sensor Array Mohammad Hadi Shahrokh Abadi 1,*, Mohd Nizar Hamidon 1, Abdul Halim Shaari 2, Norhafizah Abdullah 3 and Rahman Wagiran 1 1 Electrical and Electronic Department, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mails: mnh@.my (M.N.H.); rwagiran@.my (R.W.) 2 Physics Department, Science Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mail: ahalim@.my (A.H.S.) 3 Department of Chemical Environmental Engineering, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mail: fizah@.my (N.A.) * Author to whom correspondence should be addressed; E-Mail: mhshahrokh@. Received: 5 June 2011; in revised form: 5 July 2011 / Accepted: 21 July 2011 / Published: 5 August 2011 Abstract: A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times. Keywords: gas sensor; th