Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications 英文参考文献.docVIP

Sensors 2011, 11, 2640-2651; doi:10.3390/s110302640 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications Lijie Li * and Zhuming Liu Multidisciplinary Nanotechnology Centre, College of Engineering, Swansea University, Swansea, SA2 8PP, UK * Author to whom correspondence should be addressed; E-Mail: L.Li@swansea.ac.uk; Tel.: +44-01792-606-667. Received: 15 November 2010; in revised form: 11 January 2011 / Accepted: 22 February 2011 / Published: 1 March 2011 Abstract: In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V. Keywords: temperature characteristics; coplanar waveguide; biosensors 1. Introduction Microwave biosensors usually don’t require the biosamples to be optically or chemically altered, which is a big advantage compared with optical and chemical biosensors. Micromachined coplanar waveguides have been used to realize biosensors due to their smaller size and high performance [1,2]. Several examples of using coplanar waveguides as microsensors are summarized as follows. A gas sensor composed of a suspended micromachined coplanar waveguide with carbon nanotubes as dielectric materials was reported in [3], which was based on gas-induced variation