A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS.docVIP

Sensors 2008, 8, 994-1003 sensors ISSN 1424-8220 c 2008 by MDPI /sensors Full Paper A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS Mohamed Boutaayamou1,?, Ruth V. Sabariego1 and Patrick Dular1,2 1 Department of Electrical Engineering and Computer Science, Applied and Computational Electromagnetics (ACE), FNRS 1 University of Li`ege, 1,2 Sart Tilman Campus, Building B28, B-4000, Li`ege, Belgium E-mails: MBoutaayamou@ulg.ac.be; R.Sabariego@ulg.ac.be; Patrick.Dular@ulg.ac.be ? Author to whom correspondence should be