A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection.docVIP

Sensors 2010, 10, 1573-1588; doi:10.3390/s100301573 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection Liqiang Xie *, Xuezhong Wu, Shengyi Li, Haoxu Wang, Jianbin Su and Peitao Dong College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, 410073, Hunan Province, China; E-Mails: xzwu@ (X.W.); syli@ (S.L.); whx152@ (H.W.); sujianbin1983@163.com (J.S.); dongpeitao@ (P.D.) * Author to whom correspondence should be addressed; E-Mail: nudtxie@. Received: 22