Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip.docVIP

Sensors 2009, 9, 10158-10170; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip Ching-Liang Dai 1,*, Po-Wei Lu 1, Chienliu Chang 2 and Cheng-Yang Liu 3 1 Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan; E-Mail: player0912@ 2 Corporate RD Headquarter, Canon Inc., Tokyo 146-8501, Japan; E-Mail: clchang6@.tw 3 Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu, 300, Taiwan; E-Mail: CY_Liu@.tw * Au