_MEMS传感器现状及应用 1.pdfVIP

MEMS 传感器现状及应用 王淑华 ( 中国电子科技集团公司 第十三研究所, 石家庄 0500 51) : MEMS 传感器种类繁多, 发展 猛, 应用广泛首先, 简单介绍了MEMS 传感器的分类 和典型应用其次, 对MEMS 压力传感器加速度计和陀螺仪三种最典型的MEMS 传感器进行 了详细阐述, 包括类别技术现状和性能指标最新研究进展产品, 及应用情况介绍 MEMS 压力传感器时, 给出了国内外采用新型材料制作用于极端环境下压力传感器的研究情况 最后, 从新材料加工和组装技术方面对MEMS 传感器的发展趋势进行了展望 : 微电子机械系统 (MEMS) ; 传感器; 加速度计; 陀螺仪; 压力传感器 : TH703 : A : 1671- 477 6 (20 11) 08-0516- 07 Current Status and Applications of MEMS Sensors Wang Shuhua ( The 13th R esear ch I ns t itute, CE T C, S hij iaz h uang 0500 51, Ch ina) Abstract: MEMS sensors feature great varieties, rapid develop ent and wide applications. Firstly, the categories and typical applications of MEMS sensors are introduced briefly. Then three typi cal MEMS sensors, ie. the pressure sensor, accelero eter and gyroscope are illustrated in de tail, including thesubdivision, current technical capability and perfor ance index, latest research progress, products and their applications. Besides that, the research status of the MEMS pres sure sensor using new aterials for the extre e environ ent at ho e and abroad is presented. Finally, develop ent trends of MEMS sensors are predicted in ter s of new aterials, proces sing and asse bling technology. Key words: icroelectro echanical syste (MEMS) ; sensor; accelero eter; gyroscope; pres sure sensor DOI: 10.39 69/ j. issn. 1671- 477 6.20 11.0 8.00 8 EEACC: 2575 , MEMS , 0 引 言 MEMS MEMS , , MEMS 1962 , MEMS , MEMS , MEMS MEMS : 2011- 04- 06 Email: 1117shuhua@ 163.co 516 M icr onanoelectron ic Tech nolo gy Vol.4 8 No. 8 A ug ust 20 11