哈工大-sem实验报告.docVIP

《先进材料表征技术》课程 学生实验报告 实验名称： 扫描电镜与能谱仪的原理及应用 姓 名： 实验时间： 2015 年 11 月 6 日 哈尔滨工业大学深圳研究生院  1. Be familiar with the structure and principle of scanning electron microscope . 2. Be familiar with the requirement of sample preparation. 3. Know about the operation specification of SEM, be familiar with the differences between image of secondary electron and backscatter electron. 4. Know about the operation specification of EDS, be familiar with the point analysis, line analysis and mapping. II. Principles 2.1Resolution and contrast For imaging, resolution