基于义齿压力检测的MEMS电容式压力传感器的研制论文.pdfVIP

第19卷第5期 传感技术学报 V01．19No．5 2006年10月 CHINESEJOURNALOFSENSORSANDACTUATORS 0ct．2006 ArtificialDenture ofMEMS SensorBasedonPressure DevelopmentCapacitance HU Yah—fet，FENGYong-jian’ Hong—ping，LING 361005，China) (Dep．OfMech．Elect．，XiamenUniversity，XiamenFujian to its Abstract：Ifwewantto the ofa ofartificialdenturewehaveunderstandaction appraisequalitypair situation totheoral tothe oftheelectric trans— organizing cavityunderneath．Accordingprinciple capacity and inoral conditions，thisthesisusedtheMEMScraftandde— ducertheartificialdenture cavityworking akindofnewmedicalMEMS sensor．Weembedthesensorintheartificialdenture veloped capacitance BASE itsactionconditiontotheoral underneathandfoundthatthissensorcan distributedly，tested cavity measurethe andthe distributionofthemucousundertheoral andthebone strength strength layer cavity the can tissueundermucous sensorhas inthestructureand layeraccurately．Thisgoodstability survey．It beusedin theactionsituationofa ofartificialdenture totheoral under— measuring pair organizing cavity neathinbadcondition． detection words：artificialdenture；medicalsensor；MEMS；pressure Key EEACC：2572；7320V 基于义齿压力检测的MEMS电容式压力传感器的研制 胡洪平，林雁飞，冯勇建‘ (厦门大学物理与机电工程学院机电系，福建厦门3610