刘晓宇学位授予单位.PDFVIP

52 题名: Research on Superconducting NbN, NbTi Films Preparation and Related Devices 作者: 刘晓宇 学位授予单位: 南京大学 关键词: NbN:7149,薄膜性能:5409,NbTi:3963,溅射:1135,器件:956,超导 NbN 薄膜:660,超导 NbTi 薄膜:660,AlN 薄膜:660,微桥结构:363,混频器噪声:323,临界电流密度:182,超导能隙:173, 离子清洗:137, 电子束曝光技术:133,离子束清洗:114,超导临界电流:111,离子束轰击:106,靶 材:101,电子弛豫时间:98,光刻技术:93 摘要: Superconducting hot electron mixer (HEB) has a unique advantage in the attractive 0.1～ 6THz band because of its low local power requirements and unlimited operating frequency to superconducting energy gap. Therefore, it has a wide range of applications in astronomy, atmospheric ozone detection, and detection of THz imaging. The main work in this thesis is to study the fabrication of superconducting NbN, NbTi thin film, and the design and preparation of the phonon cooled HEB mixers based on the superconducting thin films. The fabrication and Properties of NbN, NbTi Thin Films Using Magnetron sputtering technology, we fabricated 4-8nm ultra-thin superconducting NbN films on single crystal Si substrates with different sputtering pressure and different mixing ratio of gases. For the 4nm thick NbN films, the superconducting transition temperature(Tc0) was 7.1K, superconducting critical current density reached the order of 106 A/cm2. In addition to Sputtering of the NbN films, we also fabricated the superconducting NbTi thin films of different thickness using a target ratio is 53:47(purity of 99.9%). Through continuous improvement, we prepared 6.5nm thick NbTi thin films, and its Tc0 reached 6.8K. Jc reached 106 A/cm2. We found that NbTi superconducting films will decline rapidly because of the oxygen affinity. To solve this problem, a layer of AlN insulating film was prepared on the surface of NbTi films to cut off contact with the air. Then the NbTi superconducti