多平行超短脉冲激光加工.pdfVIP

AF3A.5.pdf Advanced Solid State Lasers Conference © OSA 2015 Multi parallel ultrashort pulse laser processing a a a A. Gillner , M. Jüngst , P. Gretzki aFraunhofer-Institute for Laser Technology, Aachen, Germany Abstract: Ultra-short pulse lasers present a new class within high-performance laser beam sources for industrial applications [1]. Due to the outstanding features of the radiation emitted from these sources, which are addressing important physical principles of light-matter interaction, traditional processes of deposition of light energy into the material can be circumvented. With pulse durations in the picosecond and femtosecond range, the absorbed energy is concentrated in the material to a few nanometers, so that thermal damage to the materials can be avoided. These properties have generated numerous processes in in precision machining at solar cells, batteries, injection molding tools and electronic components [2]. Due to the current developments for power scaling of ultrafast lasers in the kilowatt range, also potential applications for macro processing are obtained, which opens large markets in other than the micro proces sing field [3]. Thus, with high-power ultrafast lasers, fiber reinforced composites can be processed without thermal influence and large surfaces can be provided with friction-minimizing microstructures. However, using high power ultrashort pulsed