雷射微細製程應用專輯.PDFVIP

雷射微細製程應用專輯 飛秒雷射實驗系統作介紹，並說明在透明材料之微 關鍵詞 細加工成果，以及近兩年連結國內學界單位，將飛 秒雷射微細加工應用在生物感測器、生物晶片之研 ‧透明材料 Transparent materials 究成果。 ‧飛秒雷射 Femtosecond laser The pulse width of femtosecond laser is in the ‧光纖雷射 Fiber laser domain of femtosecond (fs=10-15s). This ultra short ‧生物感測器 Biosensor pulse processing mechanism of material is different ‧生物晶片 Biochip from the long pulsed laser. Due to the properties of low heat affected zone and the nonlinear absorption are usable on micron/nano ultra-precision machining on 摘要 surface and internal of transparent materials, this technique has been applied using in high-precision and 飛 秒 雷 射 是 指 雷 射 脈 衝 寬 度 在 飛 秒 value added products manufacturing in other countries. (femtosecond, fs=10-15s)等級，材料在此超短脈衝 This research was basis on femtosecond laser 寬度照射下，加工機制有別於長脈衝雷射，具極低 application technology laboratory in IITRI South, 熱影響區及非線性吸收特性，可在透明材料表面及 introduced the result of micromachining of transparent 內部進行微米或奈米尺度的超精密加工，因此