消相位延迟薄膜的分析与应用.pdfVIP

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消相位延迟薄膜的分析与应用论文

Abstract 2 the basic principles of quartz crystal vibration method and photoelectric extreme value method for controlling the film thickness, and then controlled the film thickness with extreme value method reflected light. After several trial and error, we successfully coated three samples. The fifth chapter is the test portion of the sample. First we introduced the basic principle of the elliptical polarization method for testing the thin films, as well as the principles of the JOBIN YVON UNISEL ellipsometer and the photometric type optical path measurements. Then we built the photometric light path by ourselves and tested three samples, finding that the experimental results were close to the theoretical analysis. Especially for the sample ③ ( )whose coated film thickness was d 346nm at the optimum film thickness range, we could eliminate the phase delay well in the spectral range of 400nm and 700nm,and the residual phase delay was in the range of -1.5~3. Finally we made a qualitative analysis of some factors affecting the sample error. Key words: optical film, total internal reflection, elimination phase retardation, quartz crystal monitoring, reflected light control, elliptical polarization method, photometric light path 目录 1 目 录 第一章 绪 论 1 第二章 光学薄膜导论 3 §2.1光学薄膜概述3 §2.1.1光学薄膜的历史回顾3 §2.1.2光学薄膜的研究现状4 §2.1.3光学薄膜的发展前景6 §2.2单色平面波7 §2.2.1 Maxwell方程 7 §2.2.2波动方程的解 7 §2.2.3光学导纳9 §2.2.4 和 的边界条件 11 E H §2.3平面电磁波在单一界面上的反射和折射 12

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