飞秒激光在6H SiC 晶体表面制备纳米微结构.PDF

27 1 Vol. 27 ,No. 1 2007 1 AC TA O P T ICA SIN ICA January , 2007 : 025322239 (2007) 012010526 6 H S i C 1 1 ,2 1 1 1 1 3 1 , 510275 2 , ,, 3 , 201800  : 800 nm 400 nm6 H SiC 800 nm 400 nm 150 nm 80 nm ,800 nm 100 nm 800 nm 400 nm 100 nm , 400 nm 400 nm  : ; ; SiC ; ; : TB34 : A Fa brica t i o n of N a n os t r uct u res on 6 H S i C Cr ys t al I n d uced by Fe m t os econ d L as e r 1 Wu Xiaojun 1 J ia Tianqing1 ,2 Zhao Fuli 1 Huang Min 1 Chen Hongxin 1 3 Xu Nings heng Xu Zhizhan 1 St ate Key L abor ator y of Op toelectonic Materi als a n d Tech nologies , S u n Yat2sen U niversit y , Gu a ngzhou 510275 2 Instit ute f or Soli d St ate Physics , U niversit y of Tokyo , 5 2125 Kas hiwa noha , Kas hiwa , Chiba 277 28581 , J ap a n 3 St ate Key L abor ator y of High Fiel d L aser Physics , S ha nghai Instit ute of Op tics a n d Fi ne Mecha nics , t he Chi nese Aca dem y of Sciences , S ha nghai 201800 Abs t ract : Laser2induced periodic nanost ructures have been observed in several kinds of material including dielect ric , semiconductor , metal and polymer. Fabrication of nanost ructures on 6H SiC crystal illuminated by 800 nm and 400 nm femtosecond laser is studied. Interference ripples with perio