不同衬底温度下生长的Bi1 5Zn1 0Nb1 5O7 0薄膜的XPS 研究.PDF

33 5 2013 5 CHINESE JOURNAL OF VACUUM SCIENCE AND ECHNOLOGY 415 Bi Zn Nb O XPS 1. 5 1.0 1.5 7. 0 * 张效华 辛 凤 胡跃辉 陈义川 杨 丰 ( 333000) Deposition and Characterization of Bi Zn Nb O Films 115 110 115 71 0 * Zhang Xiaohua ,Xin Feng,Hu Yuehui, Chen Yichuan, Yang Feng ( Dep artment of Mechanical and Electronic Engineering , Jingdezhen Ceramic I nst itute , Jing dez hen 333000, China) Abstract he Bi Zn Nb O ( BZN) ceramic films were deposited by pulsed laser deposition (PLD) on Pt/ 115 110 115 710 iO / SiO / Si ( 100) substrates. he influence of the deposition conditions, including the substrate temperature, pressure, 2 2 and oxygen flow rate, on properties of the BZN filmswere experimentally studied. he microstructures and electronic struc- tures of the BZN films were characterized with X-ray diffraction and X-ray photoelectron spectroscopy (XPS) . he prelim- inary results show that the substrate temperature strongly affects the phase and electronic structures of the BZN films.As the substrate temperature increased, amorphous phase formed at 500e , a transition from amorphous phase into cubic py- rochlore phase started at 550e , and the binding energy peaks of metals cations showed a blue-shift at 600e . he blue- shift of the O1s peak may possibly originate from oxygen vacancies. he valence states of B