Michael quirk_半导体制造技术-第五章_半导体制造中的化学品.pptVIP

Semiconductor Manufacturing TechnologyMichael Quirk Julian Serda ? October 2001 by Prentice HallChapter 5 Chemicals in Semiconductor Fabrication Objectives After studying the material in this chapter, you will be able to: 1. Identify and discuss the four states of matter. 2. Describe the important chemical properties relevant to semiconductor manufacturing. 3. State how the different process chemicals are categorized and used in a wafer fab. 4. Explain how an acid, base and solvent are used in chip manufacturing. 5. State whether a gas is a bulk or specialty gas and how each type of g