Michael quirk_半导体制造技术-第十章_氧化.pptVIP

Semiconductor Manufacturing TechnologyMichael Quirk Julian Serda ? October 2001 by Prentice HallChapter 10 Oxidation Objectives After studying the material in this chapter, you will be able to: 1. Describe an oxide film for semiconductor manufacturing, including its atomic structure, how it is used and its benefits. 2. State the chemical reaction for oxidation and describe how oxide grows on silicon. 3. Explain selective oxidation and give two examples. 4. State the three types of thermal processing equipment, describe the five parts of a vertical furnace, and give the attributes of