Michael quirk_半导体制造技术_第四章_硅和硅片制备.pptVIP

Semiconductor Manufacturing TechnologyMichael Quirk Julian Serda ? October 2001 by Prentice HallChapter 4Silicon and Wafer Preparation Objectives After studying the material in this chapter, you will be able to: 1. Describe how raw silicon is refined into semiconductor grade silicon. 2. Explain the crystal structure and growth method for producing monocrystal silicon. 3. Discuss the major defects in silicon crystal. 4. Outline and describe the basic process steps for wafer preparation, starting from a silicon ingot and finishing with a wafer. 5. State and discuss seven quality measure