偏光片-样品-析光片之影像式椭圆偏光术-国立交通大学机构典藏.PDF

-- 李 立 論 量亮度 量 參數Ψ∆α 率量亮度 不量度 料理都省 精度 量 α α 不量 參數 來量 (GRIN lens)料 參數量量不量 了 率度 量 率 率量 1 Polarizer-Sample-Analyzer (PSA) imaging ellipsometry StudentKan-Yan Lee Adviser Dr.Yu-Faye Chao Institute of Electro-Optical Engineering National Chiao Tung University Abstract This work presents a simple three-intensity measurement technique to determine the ellipsometric parameters (Ψ, ∆) and the azimuth deviation of the polarizer (α) in a polarizer-sample-analyzer (PSA) imaging ellipsometer. Since we have to improve the ellipsometric measurements by using polarizer’s azimuth at 45o o and –45 , the parasitic error of the beam deviation in rotating element ellipsometry is solved by a nonuniform dirt spot on the wedge glass. We will prove that the α can be used to measure the normal direction of surface, so we can use it to measure the surface topography. In addition to measure the refractive index profile of a GRIN lens, we also measure the refractive profile and radius curvature of a Plano-convex lens by means of this imaging ellipsometric technique. 2 錄 ……………………………………………… …… 1 ……………………………………………… ……