基于共面去耦结构的空间三维电场测量方法Measuring Method of.PDF

基于共面去耦结构的空间三维电场测量方法Measuring Method of.PDF

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基于共面去耦结构的空间三维电场测量方法Measuring Method of

36 10 Vol.36No.10 2014 10 Journal of Electronics Information Technology Oct. 2014 ( 100190) ( 100049) ( 100871) 3 3 X, Y, Z 3 3 3 3 3 (MEMS)3 3 3 3 3 MEMS 3 3 TP212; TM937 A 1009-5896(2014)10-2504-05 DOI: 10.3724/SP.J.1146.2013.01921 Measuring Method of Three Dimensional Atmospheric Electric Field Based on Coplanar Decoupling Structure Wen Xiao-long Peng Chun-rong Fang Dong-ming Yang Peng-fei Chen Bo Xia Shan-hong (Institute of Electronics, Chinese Academy of Seiences, Beijing 100190, China) (University of Chinese Academy of Sciences, Beijing 100049, China) (Institute of Microelectronics, Peking University, Beijing 100871, China) Abstract: To deal with the issue of coupling between three components of electric field in measuring, this paper presents a new 3-D testing method based on coplanar decoupling structure. Different from the conventional testing method, which places sensing elements in three orthogonal directions of X, Y, Z, in the proposed method sensing elements are arranged un-collinearly in the same plane, and the demodulation of X, Y, Z components from three sensing elements is realized by utilizing an electric field coupling sensitivity matrix. A three dimensional electric field sample sensor is developed using MEMS chips as sensing elements. Furthermore, an innovative fixture is designed, which can realiz

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