A general modelling and control framework for electrostatic systems英文资料.pdfVIP

INTERNATIONAL JOURNAL OF ROBUST AND NONLINEAR CONTROL Int. J. Robust Nonlinear Control 2005; 15:839–857 Published online 15 September 2005 in Wiley InterScience (). DOI: 10.1002/rnc.1027 A general modelling and control framework for electrostatically actuated mechanical systems n D. H. S. Maithripala1,z, B. D. Kawade1,}, J. M. Berg1, ,y and W. P. Dayawansa2,} 1Department of Mechanical Engineering, Texas Tech University, U.S.A.