一种非球面超精密单点磨削与形状误差补偿技术.pdfVIP

第 46 卷第 23 期 机 械 工 程 学 报 Vol.46 No.23 2010 年 12 月 JOURNAL OF MECHANICAL ENGINEERING Dec. 2 0 1 0 DOI ：10.3901/JME.2010.23.186 一种非球面超精密单点磨削与形状误差补偿技术* 陈逢军1, 2 尹韶辉1, 2 范玉峰1, 2 朱勇建1, 2 刘 庆1, 2 (1. 湖南大学机械与运载工程学院 长沙 410082 ； 2. 湖南大学国家高效磨削工程技术研究中心 长沙 410082) 摘要：随着各种小型的非球面光学零部件的广泛应用，其成型模具的制造精度要求也日趋提高。针对目前我国尚未完全掌握 非球面模具的超精密磨削技术的情况，对超精密单点磨削和形状误差补偿方法进行研究。利用在位接触式的测量系统的测量 数据重构实际的磨削轮廓曲线。根据实际磨削轮廓与目标轮廓之间的法向距离，求解出法向残余误差，并提出基于超精密单 点斜轴磨削的形状误差补偿方法。利用超精密磨床对口径为 6 mm 的超硬碳化钨的非球面光学模具进行超精密磨削、在位测 量与误差补偿试验，经过两次循环，其形状精度(Peak to valley, PV)从 449 nm 改善至 182 nm。 关键词：单点磨削 误差补偿 形状误差 非球面模具 碳化钨磨削 中图分类号：TG58 Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould 1, 2 1, 2 1, 2 1, 2 1, 2 CHEN Fengjun YIN Shaohui FAN Yufeng ZHU Yongjian LIU Qing (1. College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082; 2. National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082) Abstract ：With the widespread application of various small aspheric optical components, high-precision manufacturing technology of forming molds is deeply demanded. However, the ultra-precision grinding technology of small aspheric moulds is still undeveloped in domestic research. An ultra-precision single-point grinding technique and profile error compensation mode of aspheric mould are studied. Through processing the measured data generated from contact on-machine measurement, the actual ground profile is reconstructed. Normal resi