开启微纳传感领域的新天地方案.PDFVIP

第 9 卷 第 4 期 信 息 与 电 子 工 程 Vo1．9，No．4 2011 年 8 月 INFORMATION AND ELECTRONIC ENGINEERING Aug．，2011 开启微纳传感领域的新天地 ——Transducers 2011 国际会议综述 ＊ 孙旭明，朱福运，唐 伟，张晓升，袁 泉，张海霞 (北京大学 微米 /纳米加工技术国家重点实验室，北京 100871) 通讯作者： hxzhang@ 摘 要：2011 年 6 月 5 日至 9 日，第 16 届国际固态传感器、执行器与微系统会议(Transducers ’11) 在北京国家会议中心隆重召开。此次会议设有微纳传感器、微加工技术、生物、微能源等 12 个专题， 共录用 743 篇文章，吸引了来自世界各地的 1200 多位专家、学者。本文将从大会特邀报告、微流体技 术、圆片级加工技术、化学传感器、微能源装置等角度详细介绍此次会议的盛况，分析相关领域的研究 现状及发展趋势，并对会议的影响进行总结和阐述。 关键词：Transducers ’11；MEMS；新型传感器；微系统 The New Era of Sensors，Actuators and Micro Systems ——Overview of Transducers’11 SUN Xu-ming，ZHU Fu-yun，TANG Wei，ZHANG Xiao-sheng，YUAN Quan，ZHANG Hai-xia ＊ (Key Laboratory of Science and Technology on Micro/Nano Fabrication，Institute of Microelectronics， Peking University，Beijing 100871，China) Abstract： The 16th International Conference on Solid-State Sensors， Actuators and Micro Systems (Transducers ’11) was held in Beijing，China during June 5-9，2011. Including Sensors，Actuators，Fabrication， Bio-MEMS，Power MEMS and several other subjects，743 papers were accepted. This conference brought together more than 1200 leading scientists and researchers world-wide to disseminate their most recent and advanced findings. In this review，the current research in microfluidics，wafer-level process，chemical sensors and Power MEMS was introduced. The prospect of transducers was analyzed. The success of this conference would greatly