不同沉积粒子对非晶碳氢薄膜性质影响的分子动力学研究.pdfVIP

Advances in Condensed Matter Physics 凝聚态物理学进展, 2016, 5(2), 9-15 Published Online May 2016 in Hans. /journal/cmp /10.12677/cmp.2016.52002 A Molecular Dynamics Simulation Study of the Influence of Different Deposited Particle on the Properties of Hydrogenated Amorphous Carbon Films * Yan Wang, Ming Zhang , Yanhong Pan, Zhaohui Wang, Shangjie Chu, Shenye Lin College of Materials Science and Engineering, Beijing University of Technology, Beijing th th th Received: Apr. 9 , 2016; accepted: Apr. 24 , 2016; published: Apr. 27 , 2016 Copyright © 2016 by authors and Hans Publishers Inc. This work is licensed under the Creative Commons Attribution International License (CC BY). /licenses/by/4.0/ Abstract Hydrogenated amorphous carbon film (a-C:H film) is one kind of materials with metastable amor- phous structure. Hydrogenated amorphous carbon films have lots of unique properties, such as good mechanical properties, optical transmissibility, biocompatibility, and low friction coefficient. In this article, it introduces the effect of the content of C, H atoms and C-sp3, deposition rate, and rough- ness on hydrogenated amorphous carbon films by different incident angles and energy of particle. Keywords Molecular Dynamics, Hydrogenated Amorphous Carbon Films, Incident Energy, Incident Angles 不同沉积粒子对非晶碳氢薄膜性质影响的 分子动力学研究 * 王 炎，张 铭 ，潘妍宏，王昭辉，楚上杰，林申晔 北京工业大学，材料科学与工程学院，北京 *通讯作者。 文章引用: 王炎, 张铭, 潘妍宏, 王昭辉, 楚上杰, 林申晔. 不同沉积粒子对非晶碳氢薄膜性质影响的分子动力学研 究[J]. 凝聚态物理学进展, 2016, 5(2): 9-15. /10.12677/cmp.2016.52002 王炎 等 收稿日期：2016年4月9 日；录用日期：2016年4月24 日；发布日期：2016年4月27 日 摘 要 非晶碳氢薄膜(a-C:H film)是一类具有亚稳态非晶结构的薄膜材料，具有许多优异特性，如极好的力学性 能、光学透过性、生物相容性、极低真空摩擦系数