正丙醇溶胶凝胶合成氧化锆膜层的的结构光学性能.pdfVIP

Thin Solid Films 496 (2006) 227 – 233 /locate/tsf Structural and optical properties of n-propoxide sol–gel derived ZrO2 thin films G. Ehrhart a,*, B. Capoen b, O. Robbe a, Ph. Boy c, S. Turrell a, M. Bouazaoui b a Laboratoire de Spectrochimie Infrarouge et Raman (CNRS, UMR 8516), Baˆt. C-5, France b Laboratoire de Physique des Lasers, Atomes et Mole´cules (CNRS, UMR 8523), Baˆt. P-5, Centre d’Etudes et de Recherches Lasers et Applications (CERLA-FR CNRS 2416), Universite´ des Sciences et Technologies de Lille, 59655 Villeneuve d’Ascq, France c Sol– Gel Laboratory, CEA/Le Ripault, BP 16 37260 Monts, France Received 11 April 2005; received in revised form 23 June 2005; accepted 18 August 2005 Available online 19 September 2005 Abstract In this work, we present a sol–gel method for the preparation of zirconia films. Using zirconium n-propoxide as the starting precursor, a ZrO2 sol has been synthesized that remains stable for several months. Thin films were deposited using the dip-coating method. The structural characterization was performed using waveguide Raman spectroscopy. The films present an amorphous phase up to an annealing temperature of 400 -C. Both monoclinic and tetragonal phases were obtained for annealing temperatures higher than 450 -C. The proportions of these two phases were calculated from the Raman spectra and the size of the crystallites was evaluated using the low-wavenumber Raman band. The optical prope