ATX-G - Rigaku（ATX-GRigaku）.pdfVIP

The Rigaku Journal Vol. 16/ number 1/ 1999 Product Information Advanced Thin film X-ray system-Grazing incidence in-plane diffractometer. ATX-G 1. Introduction 2. Features With the remarkable progress of thin film • A high-precision 3-axis thin film goniometer has technology comes a need for diversification of the recently been developed to enable in-plane applications necessary to characterize crystal measurement. The counter can scan over a 1/4 materials that range from Silicon to III-V compound sphere while keeping the Xray beam at the grazing semiconductors. angle on the sample. To further improve the performance of electronic • Different incident optical systems can be set up by devices, it has become important to control film selectively combining a multilayer mirror with thickness, preferred orientation, composition, and several 4-crystal monochromators. perfection of these crystals as well as epitaxially • Rigaku rotating anode generators, coupled with a grown crystals. multilayer mirror, produce a powerful X-ray source capable of measuring extremely thin films. Various thin film materials, such as magnetic and semiconductor thin films, require proper evaluation of • A variety of multifunctional measurement modes the in-plane preferred orientation and the surface support the thin film evaluation, inclu-ding the stru